JPH0214642B2 - - Google Patents

Info

Publication number
JPH0214642B2
JPH0214642B2 JP4276984A JP4276984A JPH0214642B2 JP H0214642 B2 JPH0214642 B2 JP H0214642B2 JP 4276984 A JP4276984 A JP 4276984A JP 4276984 A JP4276984 A JP 4276984A JP H0214642 B2 JPH0214642 B2 JP H0214642B2
Authority
JP
Japan
Prior art keywords
receiving element
light receiving
divided
measured
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4276984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60186705A (ja
Inventor
Kimyuki Mitsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4276984A priority Critical patent/JPS60186705A/ja
Publication of JPS60186705A publication Critical patent/JPS60186705A/ja
Publication of JPH0214642B2 publication Critical patent/JPH0214642B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP4276984A 1984-03-06 1984-03-06 光学式粗さ計 Granted JPS60186705A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4276984A JPS60186705A (ja) 1984-03-06 1984-03-06 光学式粗さ計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4276984A JPS60186705A (ja) 1984-03-06 1984-03-06 光学式粗さ計

Publications (2)

Publication Number Publication Date
JPS60186705A JPS60186705A (ja) 1985-09-24
JPH0214642B2 true JPH0214642B2 (en]) 1990-04-09

Family

ID=12645178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4276984A Granted JPS60186705A (ja) 1984-03-06 1984-03-06 光学式粗さ計

Country Status (1)

Country Link
JP (1) JPS60186705A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2512050Y2 (ja) * 1986-02-18 1996-09-25 株式会社 東京精密 非接触検出装置における観察装置
JPS63250552A (ja) * 1987-04-08 1988-10-18 Yasunaga Tekkosho:Kk 光学式傷変位計測装置
JPH0737895B2 (ja) * 1988-12-16 1995-04-26 ジューキ株式会社 直接描画方法

Also Published As

Publication number Publication date
JPS60186705A (ja) 1985-09-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term